Abstract
Secondary ion mass spectrometry (SIMS) and complementary secondary neutral (particle) mass spectrometry (SNMS) investigations on VD x samples were carried out to study deuterium segregation effects induced by ion bombardment. It could be shown that the sputter process causes a distortion of the near-surface region, which leads, due to the extremely high mobility of deuterium in vanadium, to a deuterium segregation to the surface, i.e. a deuterium enrichment in the sputtered area, and at the same time to a deuterium impoverishment in the bulk (secondary preferential sputtering effect).
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