Abstract
Formation of Au-Ag alloy nanoparticles in TiN thin films is demonstrated through sequential implantation of Au and Ag ions. The irradiations were done with 200 keV Au ions at fluence of 1.0 × 1016 ions/cm2 and 150 keV Ag ions to the fluences in the range of 0.7–1.3 × 1017 ions/cm2. It was found that irradiations introduce around 1.5 at.% of gold and up to ~20 at.% of silver species causing also the significant sputtering of the surface. TiN surface besides the topographic undergoes chemical changes. The presence of silver and gold is confirmed by photoemission spectroscopy showing that the implanted ions did not form any kind of compound with the surrounding matrix. Electron microscopy evidenced the formation of crystalline and quasi-spherical particles with dimensions below 10 nm. Elemental analysis revealed that the obtained nanoparticles present Au-Ag alloys, with two elements mixed over the whole volume of the particles in different Au:Ag ratios.
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