Abstract
3D Monte-Carlo algorithm and computer code have been developed that allows choosing and optimizing the conditions of ion irradiation needed for the adequate ion-beam simulation of radiation damage under fast neutron irradiation. It is established that, by the proper selection of energy and dose of Si+ ions, it is possible to reproduce well the effect of irradiation with fission neutrons of subsurface and buried layers of silicon or Si-based 2D and 3D-heterostructures. The results can be used for testing the radiation hardness of silicon-based electronic and optoelectronic device structures.
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