Abstract
A study of ion sculpting dynamics in SiO2 and SiN using periodically pulsed ion beams reveals material transport that depends strongly on the time structure of the pulsed beams. It is found that significant nanoscale matter transport can occur over second long time scales after the ion beam has been extinguished. A simple phenomenological model described the dynamics of ion beam sculpting in terms of two material time scales. The model accounts for the surprising observation of enhanced matter transport affected by pulsed ion beams over continuous ion beam exposure.
Highlights
It is found that significant nanoscale matter transport can occur over second long time scales after the ion beam has been extinguished
A simple phenomenological model described the dynamics of ion beam sculpting in terms of two material time scales
We recently reported on how low-energy ion beams can be used to fashion nanometer sized holes, or ‘‘nanopores,’’ in silicon nitride membranes [12]
Summary
A study of ion sculpting dynamics in SiO2 and SiN using periodically pulsed ion beams reveals material transport that depends strongly on the time structure of the pulsed beams. We describe experiments using periodically pulsed ion beams that directly probe the time scales for materials transport on ion sculpted silicon dioxide and silicon nitride.
Sign-in/Register to view highlights & summary Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
