Abstract
Changes in the surface and subsurface compositions of ternary alloys during elevated-temperature sputtering with inert-gas ions were investigated. Theoretically, a comprehensive kinetic model which includes all the basic processes, such as preferential sputtering, displacement mixing, Gibbsian segregation, radiation-enhanced diffusion and radiation-induced segregation, was developed. This phenomenological approach enabled to predict the effects of each individual process or of a combination of processes on the compositional modification in model alloys. Experimentally, measurements of compositional changes at the surface of a Ag-(40 at.% Au)-(20 at.% Cu) alloy during 3 keV Ne + bombardment at various temperatures were made, using ion scattering spectroscopy. These measurements were interpreted on the basis of the results of theoretical modeling.
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