Ion Beam Mixing in Metallic Superlattices

Abstract

Ion beam mixing has become an important technique in physical metallurgy. This technique is capable of producing metastable crystalline and amorphous alloys as well as equilibrium alloys. The basic physical mechanisms of ion beam mixing in layered solids are not well understood. Unfortunately, we cannot study multilayers which consist of very thin layers by RBS, SIMS or electron microscopy. Our main purpose is to present 0–20 X-ray diffraction measurements of implanted superlattices as a tool for ion beam mixing study.