Abstract

ABSTRACTThe needs of high precision engineering currently call for dimensional tolerances of the order of 0.1μm and surface roughness of order 0.01μm, often in hard, brittle materials or materials of relatively poor machinability. The development of argon ion beam machining for milling, drilling and turning or lathing is reported as a means of satisfying these requirements. Highly controllable material removal is achieved for the fabrication of micromechanical structures, profiling of surfaces and fine surface finishing. Surface evolution at submicron precision is demonstrated, with particular reference to the production of both circular and non-circular sections in an “ion beam lathe”.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.