Abstract

The Cu–Mo alloy film with positive heat of mixing was prepared by ion beam assisted deposition (IBAD) technique. When the energy of Ar + ions was 2 keV during IBAD, metastable bcc Cu was formed in the Cu 20Mo 80 film. A Mo-based bcc supersaturated solid solution was obtained within the composition range of 0–50% Cu fraction. An fcc supersaturated solid solution was also formed around the composition of 15 at.% Mo. The formation mechanisms of the metastable alloy phases were discussed in terms of the process far from equilibrium.

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