Abstract
We report here the response of in situ formed Si-nanostructures embedded in Si-rich hydrogenated amorphous silicon nitride matrix to 100MeV Ni8+ ions irradiation under normal incidence at room temperature. Prior to irradiation, Si-nanostructures are amorphous in nature having partial crystallinity. Irradiation with a fluence of 5×1012ions/cm2 leads to dissolution of Si-nanostructures. Nevertheless, irradiation with a relatively higher fluence of 1×1014ions/cm2 enhances the nucleation and leads to the formation of amorphous Si-nanostructures. The results are understood on the basis of intense electronic energy loss induced hydrogen desorption and consequent rearrangement of the amorphous network under thermal spike formalism of ion–material interaction.
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More From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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