Abstract
A new method for surface structure formation such as a regular surface trench system was proposed previously (I.G. Levchenko, 1999). The present paper is concentrated on description of the set of principal equations and some problems of theoretically studying the above problem. The principal possibility of surface structure formation is shown on the basis of studying the ion deflection in undamped plasma oscillations. Special attention was paid to the boundary conditions. According to the two previously proposed modes of deposition, namely transit mode and extraction mode, the two sets of equations and boundary conditions were developed.
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