Ion beam energy effects on structure and properties of diamond like carbon films deposited by closed drift ion source

Abstract

In the present study DLC films deposited from acetylene gas by a closed drift ion source were investigated. Ion beam energy effects on structure as well as optical and electrical properties of the synthesized films were studied. Non-monotonic dependence of structure of the DLC films on ion beam energy was observed. The highest sp 3/sp 2 ratio as well as highest optical transparency was observed in the case of the films synthesized by 500 eV energy ion beam. However, the bandgap of the DLC films synthesized by 500 eV energy ion beam was the lowest between all investigated samples, while resistivity non-monotonically decreased with increase of the ion beam energy. These results were explained by changes of the sp 3/sp 2 ratio, structure of sp 2 bonded clusters as well as hydrogen content in the film due to the competition between the increased (decreased) ion beam energy and decreased (increased) ion/neutral ratio.