Ion beam deposited silicon carbide on glass optics and replica gratings

Abstract

The results of an attempt to coat optical flats and replace echelle gratings with ion-deposited SiC are reported. Deposition was performed by bombarding a SiC target with an ion beam angled 45 deg relative to the target. Half the target was covered with stainless steel to furnish a comparison opportunity. After precleaning SiC coatings of 300-2200 A thickness were deposited. The specimens had previously been coated with either Au or Al or were left blank. Reflectance and diffraction data were taken of the finished flats and gratings. The SiC-coated flats performed as well as uncoated flats while the echelles exhibited deteriorating performance with increasing coating thickness. Further studies are indicated on the effect of coating thickness on surface roughness.