Abstract
Biaxially aligned growth was studied by a dual-ion-beam sputtering method for fluorite type (Zr/sub 0.85/Y/sub 0.15/O/sub 1.93/ (YSZ), Hf/sub 0.74/Yb/sub 0.26/O/sub 1.87/, CeO/sub 2/), pyrochlore type (Zr/sub 2/Sm/sub 2/O/sub 7/), and rare earth C type (Y/sub 2/O/sub 3/, Sm/sub 2/O/sub 3/) oxide films on polycrystalline Ni-based alloy substrates. Cube-textured (all axes aligned with a <100> axis substrate normal) films were obtained by low energy (<300 eV) ion bombardment at low temperatures (<300/spl deg/C). The assisting ion energy dependence of crystalline alignment was discussed in connection with lattice energies for these oxide crystals. Furthermore, a fluorite-like type oxide (Zr-X-O) was found to have a shorter time constant of texture evolution than YSZ. I/sub c/=98A (J/sub c/=0.65 MA/cm/sup 2/) was obtained for a 1.5 /spl mu/m thick Y-123 film on Zr-X-O.
Published Version
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