Abstract
The composition of intermixed layers on Be containing H, D, Be, C and O has been analysed using conventional 4He RBS at 2.2 MeV together with 2.5 MeV 4He ERD for hydrogen isotope analysis. The results are compared with heavy ion ERD using 12–40 MeV Si incident ions and detection of recoils without mass separation. For the analysis of the RBS and ERD data the newly developed spectra simulation program SIMNRA has been used. The advantages and disadvantages of both methods in respect to depth resolution, data analysis and radiation damage are discussed.
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Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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