Ion Beam Analysis of Materials

Abstract

This chapter describes the standard ion beam analysis methods such as Rutherford backscattering spectroscopy (RBS), elastic recoil detection (ERD), and nuclear reaction analysis (NRA). It provides the reader with an understanding of principles of these methods, experimental setup, and applications. The RBS can be applied to thin-film samples with a thickness of several micrometers and allows the atomic composition and distribution in the depth direction. The examples of the RBS for compositions analysis of tungsten oxide film are presented. The ERD provides the depth distributions of light elements such as hydrogen. The examples of the ERD analysis for hydrogen distribution of thin films and multilayered samples are presented. The NRA using a 15N resonant nuclear reaction provides hydrogen distribution of thin films in detail. The methods presented in this chapter are being used as effective means of analyses of interface structures and the behavior of light elements, which are important in studies on thin films and multilayered materials.