Ion backscattering from layered targets

Abstract

The reflection of H atoms from amorphous layered targets were studied using a new version of the computer simulation code MARLOWE. Targets with low Z overlayers on high Z substrates, and vice versa, were investigated using normally incident atoms in the energy range from 0.01 to 1 keV. For very low energies, the backscattering is characteristic of the surface overlayer; at higher energies, which depend on the overlayer thickness, it becomes characteristic of the underlying substrate. In addition to the particle and energy reflection coefficients, the reflected atom energy distribution and the correlation between the emergent energy and angle have been examined.