Ion-atom cross-sections for sputtering of inert-gas ion incident at low energy on polycrystalline copper target

Abstract

In the collisional theory of sputtering for inert gas ion incident with energy in the eV and lower keV region on polycrystalline copper target the «power cross-section» approximation is generally used. In this paper we show that, in the (0.1÷10) keV range, the best approximation is the Brinkman cross-section derived from the correspondent potential via the modified hard-sphere method.