Ion-and electron-excited residual-gas analysis using a SIMS instrument

Abstract

The use of a SIMS instrument for residual-gas-analysis has been explored. Employing the DIDA ion microprobe, which features an auxiliary low-energy electron gun, highly sensitive residual-gas analysis has been achieved under 150 eV electron and 5 keV ion impact (Ar +, N 2 +). Ions are about an order of magnitude more effective than electrons because of the larger cross-sections for ionization (charge transfer). The estimated transmission in residual-gas analysis is as large as 5%.