(Invited) Microfabrication and Electrochemical Activation of Amorphous Carbon Nitride a-CNx Working Electrode Integrated in Microfluidic Chip

Abstract

a-CNx films are well-known polarizable interface materials with a large potential window (3 V-4 V [1]) interesting electrochemical reactivity [2] and tunable chemical surfacic composition [3]. Indeed, the surface structure, surface properties, number of grafting sites available are tunable according to the atomic percentage of nitrogen in the a-CNx [4]. High surface reactivity are highly dependent on the surface state and can be affected by synthesis (by varying the Csp3/sp2 ratio), and by pre-treatment (electrochemical or plasma). In this work, we elaborated a microfluidic chip integrating a-CNx as working microelectrodes. In brief, a titanium/ platinum (50/500 Å) underlayer was first deposited on the glass wafer and patterned as working microelectrodes for the future thin film a-CNx adhesion and conductivity. On the top of the working electrode, a 220 nm a-CNx (x=0.12), layer was deposited with DC magnetron sputtering (time =20 min, power=200 W) with a graphite target under a flow of nitrogen (PN2/Ptot =3%, Ptot =0.4 Pa). Then, a classical PDMS fluidic circuit was microfabricated and pre-treated with nitrogen plasma to favor its adhesion onto the glass slide containing the Ti/Pt/ a-CNx microelectrodes. The a-CNx microelectrodes were also electrochemically pre-treated in galvanostatic mode using 0.1 M KOH solution (anodic pre-treatment). The hydrodynamic properties of the fluidic channel a-CNx microelectrodes (as-grown and pre-treated) were screened with the [Fe(III)(CN)6]3−/[Fe(II)(CN)6]4− redox couple by cyclic voltammetry and impedance spectroscopy to provide a basis for further investigations such as the influence of a-CNx electrode pre-treatment on the DNA probe density issues in order to enhance the hybridization reaction efficiency with its specific DNA target. [1]. A. Lagrini, C. Deslouis, H. Cachet, M. Benlahsen, and S. Charvet. Elaboration and electrochemical characterization of nitrogenated amorphou scarbon films, Electrochem. commun., 6(3) (2004) 245–248. [2]. G Adamopoulos, C Godet, C Deslouis, H Cachet, A Lagrini, and B Saidani. The electrochemical reactivity of amorphous hydrogenated carbon nitrides for varying nitrogen contents: the role of the substrate. Diam. Relat. Mater.,12 (2003) 613– 617. [3]. R A Medeiros, A Benchick, R C Rocha-Filho, O Fatibello-Filho, B Saidani, C Debiemme-Chouvy, and C Deslouis. Simultaneous detection of ascorbic acid and dopamine with electrochemically pretreated carbon nitride electrodes: Comparison with boron-doped diamond electrodes. Electrochem. commun., 24 (2012) 61–64. [4]. M Faure, F Billon, A M Haghiri-Gosnet, B Tribollet, C Deslouis, A Pailleret, and J. Gamby. Influence of the atomic nitrogen content in amorphous carbon nitride thin films on the modulation of their polarizable interfaces properties. Electrochim. Acta, 280 (2018) 238-247.