(Invited) Microfabricated Nanocomposite Polymers and Thin Films for Flexible Substrate Microfluidics and MEMS

Abstract

While many materials have been employed to fabricate microelectromechanical systems (MEMS) and microfluidic systems for lab-on-a-chip, polymers are under increasing focus to realize highly flexible microinstrumentation that can conform to the body or other surfaces. Polymers are also optically transparent, biocompatible, and inexpensive. For MEMS and microfluidics, active devices such as actuators, as well as conductive tracks for read-out and control electronics, are also required, but may be difficult to implement on polymers. This paper discusses new approaches to the development of highly flexible MEMS and microfluidics, including highly conductive and magnetic nanocomposite polymers for active devices and conductive tracks. Hybrid systems fabrication employing these polymers, as well as fabrication of thin-film-metal-on-polymer devices, is also presented. The preparation, micropatterning, and integration of the different polymers is discussed, together with materials characterization, and example devices including: flexible printed circuit boards; sensor microelectrodes; and micromagnets for miniaturized actuators and microfluidic interconnect structures.