Abstract
The impact of many components and handling conditions on slurry health has been investigated extensively in previous studies. Numerous studies have shown that changes in the particle size distributions in CMP slurries can have a strong impact on scratch densities and surface roughness after CMP. This paper summarizes and quantitatively compares the impact of various components and conditions on slurry particle size distributions. The paper further summarizes oversize particle and micro scratch data from five different studies with 14 different slurry & substrate combinations. The goals of this paper are to identify the key elements that influence slurry health in the slurry delivery chain and establish a correlation between particle size distributions and micro scratch defect densities.
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