Abstract
In this study, The fabrication of a p-n junction NiO/Ga2O3 rectifier in which we employ a bilayer NiO structure with two different doping levels to achieve both high breakdown voltage and low on-state resistance was described. The band alignment of the NiO to the Ga2O3 was measured. Selective wet and dry etch processes for removing NiO from the underlying Ga2O3 was developed. Finally, the dc and switching performance of the rectifiers was characterized. The maximum breakdown voltage was 2.7 kV for a 1 mm diameter rectifier, with 2.5 A forward current and on/off ratio > 108 over a broad range of switching voltages. The reverse recovery time was limited by the measurement circuit but was < 100 µs. These results show the promise of heterojunction rectifiers based on Ga2O3 for future generations of power switching applications. Figure 1
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