Abstract
This paper presents the design, fabrication and measurements of a hybrid X-band class-E power amplifier with a MEMS output tuner that enables the power amplifier to operate at optimum efficiency and output power level despite the fabrication uncertainties/tolerances of the device and circuit. The tuner is implemented with two 2.8 : 1 analog MEMS varactors and covers an impedance range of resistance between 10 to 30 Ω and reactance of -3 to -9 Ω. The designed PA delivers 605 mW output power with power added efficiency of 52% at 10.5 GHz.
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