Abstract
Piezoelectric acoustic resonators are widely utilized for RF devices but most can only utilize a few different resonant frequencies on the same substrate. Contour mode resonators (CMR) have resonant frequencies defined lithographically offering the advantage of an extensive frequency range on the same film, wafer, or die. This work will discuss our efforts in developing ScAlN for CMRs to achieve RF performance suitable for use in RF filters. First we will discuss our RF sputter deposition process for creating high-performance Sc0.12Al0.88N piezoelectric films and compare it with an established sputtered piezoelectric AlN. Fabrication and integration techniques for fabricating CMRs will be then detailed. Finally, electrical design and resonator performance is then discussed. These early investigations into ScAlN films suggest that performance metrics such as k2 eff can substantially improve while simultaneously ensuring good resonator Q factors over a wide frequency range of devices.
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