Abstract
Electronic devices using oxide semiconductor based thin-film transistors (TFTs) were commercialized for the first time in 2012 as backplane active-matrix circuits for flat-panel displays after almost half a century from their first demonstration in 1964. Such a miraculous revival was induced by discovery of high-mobility semiconductor materials made from amorphous oxides of post-transition metals and invention of TFTs using them for their channel materials in 2004. The present paper provides a historical review of oxide semiconductor based TFTs, their recent advances in the recent decade along the strategy and scenario, and a prediction of their future.
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