Abstract
The evolution of the semiconductor industry has led the manufacturers to shift from microelectronics to nanoelectronics. This is the accomplishment of a continuous race towards the ultraminiaturization combined with performances enhancement. The result is depicted in impressive modules where we can observe an heterogeneous integration of components in the package. This paper will explain the progress made in the integration of Silicon capacitors in different fields such as the capacitance, the design , the parasitics , the thickness ,the usage. It will be illustrated by the numerous possibilities of integration . The portfolio of the different technologies used to make high reliability Silicon capacitors will be described and the corresponding performances and advantages will be exposed for each market : Mobile , Medical, Power electronics and Communication .
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