Abstract
In this study, the femtosecond laser was used to process carbon fiber-reinforced silicon carbide (C/SiC), and the morphologies under different laser processing parameters were compared. The experimental process was photographed by a high-speed camera. It was found that the original surface roughness of C/SiC had a significant effect on the laser ablation morphology, and that the laser irradiation at different positions of the material surface could cause irregular morphology. A large amount of debris generated during the action of femtosecond laser pulse was ejected with the plasma at high speed and was deposited in the processing region. The reaction products CO and CO2 leaved the material, and the SiO2 particles covered the C/SiC surface to form an oxide layer. The research can help to understand the ablation mechanism of the femtosecond laser on C/SiC, and to provide basis for further optimizing the laser processing quality on silicon carbide ceramic matrix composites.
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