Abstract
Antimony ions, often employed as dopants for silicon, were generated by liquid metal ion sources using ternary AuGeSb, AuSiSb and PtPSb alloys as source materials. The temperature range of the coexistence of solid and liquid phase of the investigated alloys was determined by the method of differential thermal analysis (DTA). A nearly eutectic composition could be found for the AuGeSb and AuSiSb alloys. The surface composition of the wetted needle emitters was determined by means of electron microprobe investigations. Measurements of the mass distribution of the emitted ions have shown the occurrence of many different cluster ions. The intensity ratio of doubly to singly charged ions is found to be influenced by the alloy constituents.
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