Investigations of time-averaged electron energy and electron density for different radii and gas pressures in capacitively coupled neutral loop discharges (CCP-NLD)

Murat Vural ,Fatih Sirin ,Ralf Peter Brinkmann

doi:10.1109/plasma.2008.4590637

Investigations of time-averaged electron energy and electron density for different radii and gas pressures in capacitively coupled neutral loop discharges (CCP-NLD)

Murat Vural , Fatih Sirin + Show 1 more

https://doi.org/10.1109/plasma.2008.4590637

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Publication Date: Jun 1, 2008

Affiliation: Ruhr University Bochum

#Time-averaged Electron Density #Neutral Loop + Show 8 more

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Abstract

This paper investigates the behaviour of the time-averaged electron density and electron energy for neutral gas pressures between 0.5 Pa and 10 Pa, and for different radii between 5 cm and 20 cm of the neutral loop (NL). The particle-in-cell (PIC) simulation results of radially and axially resolved profiles are presented. The influence of the reactor geometry and gas pressure on the homogeneity and heating mechanism are also shown.

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