Abstract
This paper investigates the behaviour of the time-averaged electron density and electron energy for neutral gas pressures between 0.5 Pa and 10 Pa, and for different radii between 5 cm and 20 cm of the neutral loop (NL). The particle-in-cell (PIC) simulation results of radially and axially resolved profiles are presented. The influence of the reactor geometry and gas pressure on the homogeneity and heating mechanism are also shown.
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