Abstract
The features of atomic and electron structure and phase composition of the surface in the samples of macro-, micro- and nanoporous silicon and their changes with depth were investigated with the use of X-ray photoelectron spectroscopy, ultrasoft X-ray emission spectroscopy and scanning electron microscopy. Analysis of the X-ray emission spectra applying the simulation method allowed to follow the trends in the changes of the composition for the investigated samples starting from the surface and into the bulk and to show the differences in the phase composition between the samples of porous silicon with different pores size.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
