Abstract
UV emission of silicon oxide molecules observed from a non-thermal atmospheric pulsed dielectric barrier discharge was experimentally explored in a spectral range from 228 to 253 nm. The main vibrational bands (1, 1), (2, 2) and (0, 1) of A 1Π–X 1Σ+ electronic transition were investigated. Corresponding synthetic spectra was built up and adjusted with good agreement. Excitation temperatures (Tvib, Trot) were deduced as a function of gas composition. It is shown that the rotational temperature can represent a non-intrusive diagnostic of plasma gas temperature in process control.
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