Abstract

Photoacoustic spectroscopy is a useful monitoring technique that is well suited for trace gas detection applications. A sensitive and compact differential photoacoustic method for trace gas measurements is proposed. The technique possesses favorable detection characteristics that suggest the system dimensions may scale to a micro-system design. The objective of present work is to incorporate two strengths of the Army Research Laboratory (ARL); Interband Quantum Cascade Laser (ICL) source development and Chemical and Biological Sensing; we then applied them into a monolithic micro-electromechanical systems (MEMS) photoacoustic trace gas sensor. Previous data has shown that reducing the size of the photoacoustic cell can produce a very sensitive sensor using a CO 2 laser. Recent work has shown that with further reduction in the size of the photoacoustic cell in combination with an ICL as the source, produces favorable detection limits for Dimethyl Methyl Phosphonate (DMMP) a precursor to a nerve agent. These studies involve the incorporation of an ICL source operating at ~3.45 mm. This experimentation is expected to culminate in the creation of an extremely versatile MEMS photoacoustic sensor.

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