Investigations and optimization of rotary tool micro-USM process for fabrication of microchannels

Abstract

This article reports on investigations on process parameters of rotary tool micro-USM during machining of glass. Abrasive size, tool rotation speed, concentration, and power rating were the selected process parameters investigated in this study. The material removal rate (MRR) was chosen as response characteristics. Optimal parametric combination for maximum MRR was also determined by adopting Taguchi’s methodology in this investigation. The results obtained from analysis of variance revealed that tool rotation speed followed by abrasive size and concentration with a percentage contribution of 46.37%, 31.78% and 5.55% respectively were the significant parameters for MRR. The MRR increased with increasing the tool rotation speed and concentration and decreasing the abrasive mesh size. The maximum MRR was obtained at lower level of abrasive mesh size and higher level of rotation speed and concentration of abrasive slurry.