Abstract
This paper presents the investigation on the effect of different designs of Stress Concentration Region (SCR) on the change of resistance in piezoresistive microcantilever using Finite Element (FE) analysis. Two steps solution using memMech and memPzr solvers in Conventor is used in FE analysis in order to obtain the resistance change directly from microcantilever. Simulation results show that cantilever with SCR circle design gives the desired highest magnitude and broader stress distribution region thus contributing to the most significant result for piezoresistive effect.
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