Abstract
Due to the common path structure being insensitive to the environmental disturbances, relevant Fabry–Pérot interferometers have been presented for displacement measurement. However, the discontinuous signal distribution exists in the conventional Fabry–Pérot interferometer. Although a polarized Fabry–Pérot interferometer with low finesse was subsequently proposed, the signal processing is complicated, and the nonlinearity error of sub-micrometer order occurs in this signal. Therefore, a differential quadrature Fabry–Pérot interferometer has been proposed for the first time. In this measurement system, the nonlinearity error can be improved effectively, and the DC offset during the measurement procedure can be eliminated. Furthermore, the proposed system also features rapid and convenient replacing the measurement mirrors to meet the inspection requirement in various measuring ranges. In the comparison result between the commercial and self-developed Fabry–Pérot interferometer, it reveals that the maximum standard deviation is less than 0.120 μm in the whole measuring range of 600 mm. According to these results, the developed differential Fabry–Pérot interferometer is feasible for precise displacement measurement.
Highlights
From the comparison between the resolution and measuring range of different measurement devices, high resolution and contactless measurement can be realized by the laser interferometer in various measuring ranges
The laser beam is divided into a reference beam and a measurement beam by a non-polarizing beam splitter (BS), and corresponding mirrors reflect each beam and form the interferometric signal
One is the plane mirrors (PM) type whose optical cavity is composed of two PMs, and the other is the corner cube retro-reflector (CCR) type whose optical cavity consists of a PM and a CCR
Summary
From the comparison between the resolution and measuring range of different measurement devices, high resolution and contactless measurement can be realized by the laser interferometer in various measuring ranges. The laser beam is divided into a reference beam and a measurement beam by a non-polarizing beam splitter (BS), and corresponding mirrors reflect each beam and form the interferometric signal. By the integration of the differential differential optical structure and the Fabry–Pérot interferometric technique, the nonlinearity error optical structure and the Fabry–Pérot interferometric technique, the nonlinearity error can be improved effectively, and the DC offset can be eliminated during the measurement process to realize high precision measurement performance conveniently and flexibly
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