Abstract
The F2 center depth distribution in LiF thin films irradiated by 15 and 30 keV electron beams was obtained experimentally by means of optical absorption measurements of multilayered LiF/KBr films. Monte Carlo simulations of the incidence of electron beams in LiF were also carried out to provide the dissipated energy and the fluor ionization depth profiles for comparison with the experimental data. The ionization and the dissipated energy profiles have essentially the same shape, with their maxima at a depth of 41±5% of the electron range. The F2 distributions could be described by Gaussian distributions centered at depths of 1.5 and 1.6 μm for 15 and 30 keV irradiation, respectively.
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