Abstract
In this paper stable eccentric immersed polishing is investigated according to Preston equation. The polishing trace, speed, density of polishing fluid etc were analyzed in detail. The polishing practicability of the technology was verified for polishing a piece of zerodur and the supersmooth surface with the flatness of PV0.04μm was obtained. The roughness of the surface has decreased to Ra0.37nm from initial Ra1.5nm after polishing 120 minutes.
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