Investigation on Properties of MEMS Based Micropyrotechnic Igniter

Abstract

Micro-electro-mechanical system (MEMS) have recently seen their field of application extended to military. This is mainly due to the fact that MEMS technologies present a great to reduce the mass, cost, power consumption, while improving the reliability, performance and smartness. Application of MEMS technology, the micropyrotechnic igniter are produced.The principle is based on the integration of the potassium salt of 7-hydroxy-4,6-dinitro-5,7-dihydrobenzofuroxanide (KDNBF) material within a micropyrotechnic igniter, which is produced by MEMS with 3 by 3 micro-igniter. Each igniter contains three parts (the igniter chip, silicon chamber, KDNBF). One import point is the optimization of the igniter process obtaining Ni-Cr bridges with about 13Ω and Al bridges with about 350Ω, which are triggered by electrical power delivered to KDNBF. The resistance of Ni-Cr and Al bridges is used to sense the temperature on the KDNBF which are in contact. The other one point is firing testing of micropyrotechnic igniter. The ignition performance of micropyrotechnic igniter array are tested that including Ni-Cr bridges of the 50% sensitivity on voltage, current ignition is 10.83V,0.26A; including Al bridges of the 50% sensitivity on current ignition is 0.176A; the ignition of voltage is unstable. The experimental results will deeply contribute to the micropyrotechnic system. This paper will discuss all these point.