Abstract
To solve the problems in the atomic force microscope (AFM)-based nanomachining process such as nonlinearity and low repeatability positioning accuracy of AFM scanner in a larger scale, a novel micro/nanomachining system similar to conventional CNC machine tools was presented. The system integrated AFM with a precision stage. AFM optical lever detection method was employed to apply a very light normal load on the sample surface. An AFM diamond tip was utilized as a cutting tool to scratch the sample. The precision stage was used as a worktable to move the sample. This process was different from machining with a planer. Based on the system, effects of tip geometry, the scratching direction, the normal load, the machining velocity and the feed on the machining depth were discussed. Fabricating techniques of two-dimensional and three-dimensional complex micro/nano-structures using AFM-based mechanical scratching method based on this system were presented. Complex regular structures were fabricated. Moreover, AFM-tip-induced local anodic oxidation was also carried out based on this system, which displayed higher repeatability positioning accuracy with a larger machining dimensions and a significant machining ability of this system.
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