Abstract
Research institutions and industrial enterprises demand high accuracy and precision positioning systems to fulfil cutting edge requirements of up-to-date technological processes in the field of metrology and optical fabrication. Linear motor system design with high performance mechanical guiding system and optical encoder ensures nanometer scale precision and constant static error, which can be calibrated by optical instruments. Mechanical guiding systems has its benefits in case of control theory and its stability; unfortunately, on the other hand, there exists high influence of structure geometry and tribological effects such as friction and modal response. The aforementioned effect cannot be straightforwardly identified during the assembly process. Degradation of dynamic units can be detected only after certain operating time. Single degree of freedom systems are well investigated and the effect of degradation can be predicted, but there exists a gap in the analysis of nanometer scale multi degree of freedom dynamic systems; therefore, novel diagnostic tools need to be proposed. In this particular paper, dual axes dynamic system analysis will be presented. The main idea is to decouple standard stacked XY stage and analyse X and Y configuration as two different configurations of the same object, while imitators of corresponding axes are absolutely solid and stationary. As storage and analysis of time domain data is not efficient, main attention will be concentrated on frequency domain data, while, of course, statistical and graphical representation of dynamic response will be presented. Transfer function, dynamic response, spectral analysis of dynamic response, and modal analysis will be presented and discussed. Based on the collected data and its analysis, comparison of X and Y responses to different velocity excitation will be presented. Finally, conclusions and recommendations of novel diagnostic way will be presented.
Highlights
IntroductionThe precision of the manufacturing process, increasing efficiency and machining accuracy, determines the application of digitized precision computer control (CNC) in machine building [1,2]
This paper describes the modal and dynamic response of X and Y configuration linear motor stage with quasi-industrial linear guiding system and aims to find out the margins and actual response of the single degree of freedom stage excited in two different configurations: X and Y
Magnitude of error in Y configuration caused by excitation, diverge from stable near zero value and is >300% higher comparing to the same LMS in X configuration at maximal 400 mm/s velocity
Summary
The precision of the manufacturing process, increasing efficiency and machining accuracy, determines the application of digitized precision computer control (CNC) in machine building [1,2]. It is impractical, non-economical and probably impossible to produce a perfect mechanical system. Linear motor systems are gearless where friction is found only in guiding systems; dynamic response is mostly caused by mechanical structure, geometry, characteristics of the grease, friction and preload. By analysing standard procedures of mechanical adjustment and metrology, it must be emphasized that is not economical and sometimes impractical to proceed with it; novel diagnostic tools are critically required. Lack of scientific information related to combination of tribological effects, frequency response function, modal response and dynamic response of the motion system propose an innovative diagnostic set which may be an efficient way to predict the drift of static error and system dynamics
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
