Abstract
In this work we present the technique of magnetron vapor deposition and the effect of several deposition parameters on the structural and morphological properties of prepared thin films. It was noted that the deposition time has an effect on the crystallinity, mechanical properties such as residual stress, roughness surface and the layer composition from target products. Studies were carried out on layers of vanadium (V) and the nitride vanadium (VN).
Highlights
Making materials in the thin film presents a main interest in very varied application, since the last decade we observe an increasing interest for studying surfaces for their essential role to exert a decisive influence on diverse characteristics as well as corrosion, catalyses, friction, adherence, sintering, [1,2,3,4,5].Alloys containing chromium and nitrogen present varied properties which makes a interesting for mechanical, optical and electrically applications
In this work we present the technique of magnetron vapor deposition and the effect of several deposition parameters on the structural and morphological properties of prepared thin films
It was noted that the deposition time has an effect on the crystallinity, mechanical properties such as residual stress, roughness surface and the layer composition from target products
Summary
Making materials in the thin film presents a main interest in very varied application, since the last decade we observe an increasing interest for studying surfaces for their essential role to exert a decisive influence on diverse characteristics as well as corrosion, catalyses, friction (wear, lubrication...), adherence, sintering, [1,2,3,4,5]. Alloys containing chromium and nitrogen present varied properties which makes a interesting for mechanical, optical and electrically applications. In a first vision the objective in our present study is to analyze the effects of the deposition conditions such as the deposition duration, the rate of different alloys constituting the V and VN in physical and mechanical properties
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