Abstract
Positron annihilation spectroscopy was used to investigate vacancy-type defects in diamond-like carbon (DLC) films. From Doppler broadening measurements of the γ-rays produced by annihilation and positron annihilation lifetime (PAL) using a slow positron beam on DLC films deposited by various deposition methods and conditions, it was found that there is a good correlation between the S parameter obtained by Doppler broadening and PAL. The result of PAL correlates well with film density and hardness, indicating that PAL measurements can be used as an indicator of these film properties. The hydrogen content in the DLC film was roughly proportional to the PAL. However, there were also cases in which PAL differed greatly even with almost the same hydrogen content, and the sp 2/(sp 2+sp 3) ratio of carbon in DLC films has no direct relationship with PAL.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
