Abstract
We have designed and fabricated 60MHz bulk acoustic wave transducers and demonstrated the efficacy of these devices for probing the gravimetric and viscoelastic properties of layers in intimate contact with one of the electrodes. By integrating a 100nm thick nanoporous film as the top electrode of the quartz resonator, we have been able to obtain enhanced sensitivity to mass loading and investigate the physical properties of liquids confined within 25–35nm pores. By experimentally measuring the change in resonance frequency and Q-factor at the first and third resonance modes and using a detailed acoustic model in which the trapped liquid is treated as viscoelastic layer under a viscous liquid, the properties of trapped water-glycerol mixture confined in nanopores has been deduced.
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