Abstract
The surface of dysprosium and praseodymium oxide-based films is investigated by atomic-force microscopy and electron probe X-ray microanalysis. The electrical properties of the films are determined. It is shown that the electrical conductivity of the Dy2O3 films can be substantially changed by introducing dopants of zirconium and praseodymium oxides into the initial solution used for synthesizing the films (in particular, the ZrO2-based dopant increases the electrical conductivity of the Dy2O3 film and the PrOx-based dopant affects the conductivity in a complex way). The temperature dependence of the film sensitivity to ozone and vapors of ethanol and methanol is studied.
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