Abstract
Ni-Cr layers with different compositions were produced by sputtering and evaporation methods. The aim of the work was to investigate the effect of oxygen on the deposition of the layers. The layer compositions were investigated by Auger electron spectroscopy (AES) before and after carrying out different heat treatments. The results of AES, electrical measurements and electron diffraction investigations can be accounted for by the segregation of a nickel-rich metallic phase and a chromium-oxide-rich phase.
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