Investigation of the phase composition and photoluminescence of CVD (YxGdyEuz)2O3 films on Si substrates after annealing in the air

Abstract

• (Y x Gd y Eu z ) oxide-silicate films were obtained by annealing of the oxide films on Si. • The oxide-silicate films exceeded the oxide films in the integral PL intensity. • An order of the cation positions filling was set up by comparing the PL spectra. • The Ln-O binding energy affects the red-orange shift of PL chromaticity to a greater extent. • The composition (xyz), optimal in efficiency and chromaticity of PL was set up.