Abstract

A heterostructure of the p−-3C-SiC/n+-6H-SiC type with modulated doping was synthesized by sublimation epitaxy in vacuum. Features of the current-voltage characteristics and the electroluminescence spectra show evidence of quantum confinement effects in a triangular quantum well at the heterojunction. The results indicate that the proposed technology employing sublimation epitaxy in vacuum can be used to obtain quantum-confined structures based on silicon carbide.

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