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Abstract
The phase composition, structure, and optical properties of the BiFeO3/SrTiO3/Al2O3 (c-cut) heterostructure have been studied using XRD analysis, spectrophotometry, and multi-angle ellipsometry. BFO/STO/Al2O3 heterostructures have been obtained by high-frequency cathode sputtering in an oxygen atmosphere using the intermittent deposition technology. It was found that the BiFeO3 and SrTiO3 layers grew with an orientation in the direction of the [111] crystallographic axis parallel to the normal to the Al2O3 substrate. It has been shown that the damaged layer on the surface of the heterostructure does not exceed 2-3 nm, and no signs of the presence of boundary layers at the Al2O3-SrTiO3 and SrTiO3-BiFeO3 interfaces have been identified. The dispersion dependences of the refractive indices of BFO and STO layers are calculated. The reasons for the revealed regularities are discussed. Keywords: thin films, multiferroic, optical properties, ellipsometry, bismuth ferrite.
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