Abstract
The ionization balance of the bismuth-to-tin plasmas is systematically investigated on the basis of a collisional radiative model, which has been generated using a computer algorithm to analyze the level structure of multiple charged ions to construct the model. The atomic energy levels and rate coefficients corresponding to the model are calculated using the HULLAC code. With this method, we investigate the plasma temperature, which is required to obtain emission in the extreme ultraviolet wavelength range from 13.5 nm to the water window.
Highlights
An extreme ultraviolet (EUV) light source based on the laser pumped Sn plasmas is extensively investigated for application to next-generation microlithography.[1]
The total ionization energy of Pd-like Bi (Bi37+) is 20 keV/ion, which is much greater than that of Pd-like Sn (Sn4+) of 150 eV/ion. This suggests that the calculation of the ionization balance as a function of the density and temperature of the plasma using a collisional radiative (CR) model is indispensable for the development and application of short-wavelength EUV sources
It was shown that the CR model of W for fusion plasmas may become very complex, with more than 103 excited states of each ion,[10] including the excited states that have a significant population and contribute to EUV emission as well as those that contribute to dielectronic recombination in the calculation of the ionization balance
Summary
An extreme ultraviolet (EUV) light source based on the laser pumped Sn plasmas is extensively investigated for application to next-generation microlithography.[1]. Investigation of the ionization balance of bismuth-to-tin plasmas for the extreme ultraviolet light source based on a computer-generated collisional radiative model
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