Abstract
The initial stages of the growth of barium strontium titanate (BaSrTiO3) ferroelectric films deposited on single-crystal sapphire substrates have been studied using medium-energy ion scattering. It has been found that, depending on the variation in the deposition temperature, the mechanisms of formation of the ferroelectric film change as a result of the change in the mechanism of mass transfer of the deposited atoms. It has been shown that the minimum thickness of the continuous ferroelectric film on sapphire is of the order of 6 nm.
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